Thermoanalytical Techniques Analysis Essay


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Thermoanalytical (TA) methods are relatively seldom applied for assessing the physical and chemical proeprties of thin films, but they can be used in studies of composition, phase transitions and film—substrate interactions. In the present paper the possibilities of TA methods in thin film studies are reviewed. The thermoanalytical methods considered are the classical TG and DTA/DSC methods but some complementary methods will also be briefly mentioned. The main emphasis is given to true thin films. Details of sample preparation are also given. An important application of TA methods is characterization of precursors for the CVD growth of thin films, and this is also discussed.


Thermoanalytische Methoden werden relativ selten zur Beurteilung der physikalischen und chemischen Eigenschaften von Dünnschichten verwendet, können aber zur Untersuchung von Zusammensetzung, Phasenum wandlungen und Dünnschicht-Substrat-Wechselwirkungen eingesetzt werden. Es wird hier ein Überblick über die Möglichkeiten der TA-Methoden bei der Untersuchung von Dünnschichten gegeben. Die in Betracht gezogenen thermo-analytischen Methoden sind die klassischen Methoden TG und DTA/DSC, aber auch einige ergänzende Methoden werden kurz beschrieben. Das Schwergewicht liegt bei echten Dünnschichten. Es werden auch Details der Probenvorbereitung beschrieben. Eine wichtige Anwendung von TA-Methoden besteht in der Beschreibung von Präkursoren für das CVD-Wachstum von Dünschichten und dies wird ebenfalls diskutiert.

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